Guardian GS8

GUARDIAN-GS8

GUARDIAN GS8 - COMBUSTION ABATEMENT

Application

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge

Configurations

  • Floor-mount

CATEGORY:

Guardian Series

DESCRIPTION

Advantages
  • Simultaneous treatment for multiple process chambers and/or furnace tubes.
  • Low cost of ownership
  • No electrically heated elements for immediate cooldown
  • Flame flashback prevention system for safe, reliable operation
  • Natural gas-fueled
  • Low maintenance requirement
  • MTBF measured in years
  • S2-93 compliant.
  • CE marked
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