Marathon M91

Home / 

Marathon Series / 

Marathon M91 - Integrated Combustion & Wet Abatement
MARATHON-M91

MARATHON M91 - INTEGRATED COMBUSTION & WET ABATEMENT

Application

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge

CATEGORY:

Marathon Series

DESCRIPTION

Advantages
  • Low power consumption
  • Limited NOx and CO emission
  • High flow capacity
  • Reduced water consumption and recirculating water system
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked
  • Ethernet-ready
Download Brochure  > 

Related products

MARATHON-M91A

READ MORE

Marathon M91A

Integrated Plasma Gasification and Wet Abatement
MARATHON-M91AU

READ MORE

Marathon M91AU

Integrated Plasma Gasification and Wet Abatement
MARATHON-M91PD

READ MORE

Marathon M91PD

Plasma Integrated Combustion and Wet Abatement, Dual Reactors
MARATHON-M91U

READ MORE

Marathon M91U

Integrated Combustion and Wet Abatement
We Are Here To Support You

Get in touch with our business consultants now.

Contact Us  >