Marathon M91PD

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Marathon M91PD - Plasma Integrated Combustion & Wet Abatement, Dual Reactors
MARATHON-M91PD

MARATHON M91PD - PLASMA INTEGRATED COMBUSTION & WET ABATEMENT, DUAL REACTORS

Application

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge

CATEGORY:

Marathon Series

DESCRIPTION

Advantages
  • Dual reactor
  • Fail-safe capability
  • Low power consumption
  • Low cost of ownership
  • Increased processing capacity
  • Increased abatement efficiency
  • Increased MTBS
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