EcoSys Group - About Abatement System offers abatement efficiencies
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About Us

About Us

The Ecosys product line was first introduced to the Semiconductor industry in 1993 by ATMI Inc. In this year, the Ecosys division was formed, by ATMI Inc, to complement the recent acquisition of Vector Industries, with the existing Novapure (dry resin) product line.

EcoSys History

1989 – ATMI develop resin technology and launch the Novapure range

1993 – ATMI acquire Vector Technologies and create the EcoSys group

1996 – ATMI acquire Guardian from MG Technologies group

1999 – ATMI acquire the CDO from Delatech Corporation

2001 – Creation of ATMI MLS (Material Lifecycle Solutions)

2005 – Applied Materials acquire the EcoSys division from ATMI – AMAT merge EcoSys into new Metron division

2011 – BHT Services acquire abatement product line from Applied Materials

2014 – HT Advance Technology re-launch the EcoSys brand

2017 - Set Up Anhui KaiQian Automation Solutions Co., Ltd handling Ecosys products manufacturing, sales and after field service

2019 – Company changed name to AnHui EcoSys Automation Solutions Co., Ltd.

2021 - Launching of lower cost series of abatement products. Planning for second plant in China, He Fei

1989

ATMI develop resin technology and launch the Novapure range

1993

ATMI acquire Vector Technologies and create the Ecosys group

1996

ATMI acquire Guardian from MG Technologies group

1999

ATMI acquire the CDO from the Delatech Corporation

2001

Creation of ATMI MLS ( Material Lifecycle Solutions)

2005

Applied Materials acquire the Ecosys division from ATMI - AMAT merge Ecosys into new Metron division

2011

BHT Services acquire abatement product line from Applied Materials

2014

HT Advance Technology re-launch the Ecosys brand

2017

Set up Anhui KaiQian Automation Solutions Co ., LTD handling Ecosys products manufacturing, sales and after field service

EcoSys Products

Plasma

Modular (pre or post pump)

No fuel required

Power consumption :1kW~6kW

  • 400slm & 800slm capacity
  • Zero flame-out
  • LM (low maintenance up to 12 months)
  • Exhaust friendly
  • Pre-wet
  • Dual reactor
  • 2/3 of GS8 length
  • ≥800°C
  • Less dependent of facility exhaust
  • Dust removal option
  • Dual reactor
  • 600slm
  • ≥1000°C
  • Pre-wet
  • Dual reactor
  • Capture 90% of ≥10µm particles
  • Maintain Vector high efficiency on water soluble gases

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