Products

CDO C91 – INTEGRATED THERMAL AND WET ABATEMENT

Application

 

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge
Category:
Description

Advantages

 

  • Fault-tolerance heater design
  • Sedimentation compartment
  • Particles separation system
  • Limited NOx and CO emission
  • Low water consumption and recirculating water system
  • Ease of use and maintenance
  • Optional accessories available
  • Third party certified, SEMI S2 compliance, CE marked
  • Ethernet ready

 

 

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