Products

CDO 863 – THERMAL -WET ABATEMENT SYSTEM (THERMAL/WET)

Application

 

  • All semiconductor industry
  • Flat panel display industry
  • Solar Panel industry
  • Flourine-based process chamber cleans
Category:
Description

Advantages

 

  • Designed for point-of-use fluorine abatement without fuel or toxic reagents.
  • Will treat incompatible gases from multiple process outlets.
  • Reduced water consumption with recirculating water system.
  • Non-clogging entry design.
  • Lowest cost of ownership.
  • Advance alloys for improved corrosion resistance.
  • Ease of installation with standard pressurized drain.
  • Moisture suppression system reduces downstream condensation.
  • SEMI S2 compliance, CE compliant.
  • Ethernet ready.

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