GUARDIAN G91L – COMBUSTION ABATEMENT
Application
- Polysilicon
- CVD
- Pyrophoric/flammable gas combustion
- Gas cabinet vent purge
Configurations
- Floor-mount
Description
Advantages
- Extended combustion chamber for high H2 flow application
- Low cost of ownership
- No electrically heated elements for immediate cooldown
- Flame flashback prevention system for safe, reliable operation
- Natural gas-fueled
- Low maintenance requirement
- MTBF measured in years
- SEMI S2 compliance
- CE marked
