GUARDIAN G91L – COMBUSTION ABATEMENT - Ecosys
 

GUARDIAN G91L – COMBUSTION ABATEMENT

Application

 

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge

 

Configurations

  • Floor-mount
Category:
Description

Advantages

 

  • Extended combustion chamber for high Hflow application
  • Low cost of ownership
  • No electrically heated elements for immediate cooldown
  • Flame flashback prevention system for safe, reliable operation
  • Natural gas-fueled
  • Low maintenance requirement
  • MTBF measured in years
  • SEMI S2 compliance
  • CE marked

 

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