Products

Guardian GS8 – COMBUSTION ABATEMENT

Application

 

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge

 

Configurations

 

  • Floor-mount
Category:
Description

Advantages

 

  • Simultaneous treatment for multiple process chambers and/or furnace tubes.
  • Low cost of ownership.
  • No electrically heated elements for immediate cooldown.
  • Flame flashback prevention system for safe, reliable operation.
  • Natural gas fueled.
  • Low maintenance requirement.
  • MTBF measured in years.
  • S2-93 compliant.
  • CE–mark certified.

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