Marathon M91 – INTEGRATED COMBUSTION & WET ABATEMENT
Application
- Polysilicon
- CVD
- Pyrophoric/flammable gas combustion
- Gas cabinet vent purge
Description
Advantages
- Low power consumption
- Limited NOx and CO emission
- High flow capacity
- Reduced water consumption and recirculating water system
- Low cost of ownership
- Ease of installation and services
- SEMI S2 compliance, CE marked
- Ethernet-ready
