Products

Marathon M91D – INTEGRATED COMBUSTION & WET ABATEMENT, DUAL REACTORS

Application

 

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge
Category:
Description

Advantages

 

  • Dual reactor
  • Fault-Tolerant
  • Low power consumption
  • Limited NOx and CO emission
  • High flow capacity
  • Reduced water consumption and recirculating water system
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked
  • Ethernet-ready
  • Extensive range of optional components available to meet specific needs

 

 

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