Products

Marathon M91PD – PLASMA INTEGRATED COMBUSTION & WET ABATEMENT, DUAL REACRTORS

Application

 

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge
Category:
Description

Advantages

 

  • Dual reactor
  • Fail-safe capability
  • Low power consumption
  • Low cost of ownership
  • Increased processing capacity
  • Increased abatement efficiency
  • Increased MTBS

 

 

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