CDO C91

CDO C91 - Integrated Thermal & Wet Abatement

CDO-C91

CDO C91 - INTEGRATED THERMAL & WET ABATEMENT

Application

Polysilicon
CVD
Pyrophoric/flammable gas combustion
Gas cabinet vent purge

CATEGORY:

CDO Series

DESCRIPTION

Advantages

Fault-tolerance heater design
Sedimentation compartment
Particles separation system
Limited NOx and CO emission
Low water consumption and recirculating water system
Ease of use and maintenance
Optional accessories available
Third party certified, SEMI S2 compliance, CE marked
Ethernet ready

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