Vector V91

Vector Series /

Vector V91 - Wet Abatement

VECTOR-V91

VECTOR V91 - WET ABATEMENT

Application

Epitaxy
Water soluble gases
AsH₃, PH₃

CATEGORY:

Vector Series

DESCRIPTION

Advantages

Multi stages scrubbing
High flow capacity
Reduced water consumption
Recirculating water system
Low cost of ownership
Ease of installation and services
Inlet pressure control and self-cleaning mechanisms
SEMI S2 compliance, CE marked
Ethernet ready

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