Marathon M91U

MARATHON-M91U

MARATHON M91U - INTEGRATED COMBUSTION & WET ABATEMENT

Application

  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge

CATEGORY:

Marathon Series

DESCRIPTION

Advantages
  • Dual reactor
  • Fault-Tolerant Capability
  • Low power consumption
  • Limited NOx and CO emission
  • High flow capacity
  • Reduced water consumption and recirculating water system
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked
  • Ethernet ready
  • Extensive range of optional components available to meet with specific needs
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