Marathon M91AU

MARATHON-M91AU

MARATHON M91AU - INTEGRATED PLASMA GASIFICATION & WET ABATEMENT

Application

  • All semiconductor and flat panel display

CATEGORY:

Marathon Series

DESCRIPTION

Advantages
  • 3 inlets per reactor
  • Dual reactors
  • Fault-tolerant design
  • Does not required fuel or hydrogen
  • Low power consumption
  • Excellent PFCs abatement efficiency
  • Limited NOx and CO emission
  • High flow capacity
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked
Download Brochure  > 
We Are Here To Support You

Get in touch with our business consultants now.

Contact Us  >